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Main article: "Coherence scanning interferometry

Part 604 describes a class of optical surface measurement methods wherein the localization of interference fringes during a scan of optical path length provides a means to determine surface characteristics such as topography, transparent film structure, and optical properties. The technique encompasses instruments that use spectrally broadband, visible sources (white light) to achieve interference fringe localization). CSI uses either fringe localization alone or in combination with interference fringe phase.

Focus variation[edit]

Focus variation

Part 606 describes this type of non-contact areal based method. The operating principle is based on a microscope optics with limited depth of field and a CCD camera. By scanning in vertical direction several images with different focus are gathered. This data is then used to calculate a surface data set for roughness measurement.

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